Plasma Cleaning Machine V1000/V1000X/V1000XS
Contact Info
- Add:广州市天河区广汕二路13号-327-1房, Zip: 510630
- Contact: 谭真东
- Tel:020-87031216
- Email:13808866455@139.com
Other Products
Guangzhou Jincheng Scientific Instruments Co., Ltd. supplies Yamato YAMATO plasma cleaning machines V1000/V1000X/V1000XS, featuring 13.56MHz high-frequency output and equipped with RIE/DP dual modes. Applications include ashing and etching of silicon wafers, substrate surface contamination treatment, IC/LED packaging, BGA/CSP substrate processing, dry cleaning of electronic materials for semiconductor-related components, removal of natural oxide films and organic matter, interfacial activation treatment, and surface contaminant removal.
Plasma Cleaning Machine Features:
Ashing and etching of silicon wafers.
Substrate surface contamination treatment.
IC/LED packaging, BGA/CSP substrate processing.
Dry cleaning of electronic materials for semiconductor-related components.
Removal of natural oxide films and organic matter.
Interfacial activation treatment.
Surface contaminant removal.
Plasma Cleaning Machine Technical Parameters:
Model | V1000 | V1000X | V1000XS |
Plasma Mode | DP/RIE | ||
High-Frequency Power Supply | 13.56MHz | ||
Output Power | 1000W | 1500W | |
Effective Electrode Size | W280xD280mm | W300xD300mm | W400xD375mm |
Electrode | Parallel Plate | Two-Stage Electrode (Independent) | Plate (Multi-Purpose) |
Reaction Gas | Polymerization Controller 2 Systems (Gas Lines Installed Separately) | ||
Vacuum Pump (Standard) | Approx. 1000L/min | Approx. 1500L/min | 1500L/min |
Safety Devices | Door Detection Switch, Interlock Mechanism, Emergency Stop Switch, Over-Temperature Prevention Device, etc. | ||
Information about Yamato YAMATO Plasma Cleaning Machines V1000/V1000X/V1000XS is provided by Guangzhou Jincheng Scientific Instruments Co., Ltd. For more details about plasma cleaning machines, please feel free to contact us.
| Industry Category | Machinery |
|---|---|
| Product Category | |
| Brand: | 雅马拓YAMATO |
| Spec: | V1000/V1000X/V1000XS |
| Stock: | 300 |
| Manufacturer: | |
| Origin: | China / Guangdong / Guangzhoushi |
